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FROM  LABORATORY  DISCOVERY
TO   NEXT-GENERATION INNOVATION

Advanced material processing and testing solutions for the semiconductor, display, and photovoltaic industries.

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Redefining the Standard
in Precision Coating Technology

4A/4B/4C Series
 Ø100mm- Ø150mm

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KW-4L/4E Series
 Ø200mm

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KW-4Q Series
Ø300mm

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Glove Box  Series
Ø50mm

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4X  Series
EBR Systems 

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±1%

Film Thickness Uniformity

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Smart Interface

Intuitive touchscreen with intelligent process control and data logging.

 Wide Versatility

Handles diverse substrates

and aggressive chemistries with ease

Process Repeatability

Guaranteed batch-to-batch consistency for

all your thin-film processes.

Ultra-Low TIR

Precision Dynamically Balanced Chuck

 UV Ozone Cleaner
150×200mm/300×300mm/760×760mm

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Plasma Cleaner
13.56MHz

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Hot Plate
300℃-500℃

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UV-Ozone Surface Treatment

Synergistic Dual-Wavelength Cleaning


Our equipment utilizes a powerful combination of 185 nm and 254 nm UV wavelengths. The 185 nm UV converts atmospheric oxygen into potent ozone, while the 254 nm wavelength precisely breaks down molecular bonds in organic contaminants. This synergistic effect ensures thorough, atomic-level cleanliness without relying on harsh wet chemicals.

Non-Destructive Surface Modification


Beyond removing photoresist residues, our dry process significantly improves material wettability and subsequent coating adhesion. It causes absolutely zero damage to the substrate, making it ideal for delicate single-crystal materials, polymer activation, and preserving fine structures for high-resolution SEM/TEM analysis.

Auto-Film Coater
5-1000um

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Slot Die Coater
1-1000 μm

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Dip Coater
150-300mm

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Magnetron Sputter
Sputtering Area: 50mm

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Mask Aligner
Resolution: 1 μm

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Precision Processing Systems Engineered for Reliability

For over 30 years, Setcas LLC has engineered process solutions designed to withstand the rigors of aggressive chemical environments. We don’t just assemble equipment; we build robust, chemically inert tools—from Spin Coaters and Mask Aligners to Magnetron Sputtering systems. Our mission is to provide the industrial-grade durability and repeatability you need, so you can focus on your science, not your hardware.

Our Core Competencies

High-Uniformity Spin Coating Systems

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From compact manual units to programmable automated systems, we deliver consistent film thickness control for photoresists and polymers. Essential for repeatable R&D and pilot-line fabrication.

Surface Activation & Cleaning Solutions

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Our Plasma and UV-Ozone cleaners effectively remove organic contaminants and modify surface wettability. Optimize adhesion and interface quality for bonding, coating, and microfluidics applications.

Lab Hot Plates & Thermal Solutions

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Designed for precise soft-baking and curing. Our hot plates ensure exceptional temperature uniformity across the substrate, minimizing thermal shock and ensuring stable material properties.

High-Throughput Processing Tracks

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Scale your process from lab to fab. Our automated coating and developing tracks integrate multiple steps to reduce operator error and increase production yield for standard semiconductor wafers.

UV Exposure & Alignment Systems

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Cost-effective lithography solutions for MEMS and micro-devices. We provide reliable mask aligners and LED exposure units that deliver the resolution and accuracy required for academic and industrial research.

Custom Instrumentation & OEM Services

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Beyond standard equipment, we engineer tailored solutions for unique experimental protocols. We collaborate with researchers to design and build specialized instruments that meet specific scientific requirements.

Our Solutions

Deliver full-process solutions covering substrate cleaning, thin film deposition, and lithography patterning, enabling customers to achieve high-precision and high-consistency microfabrication requirements.

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Spin ​Coating&
​Developing System

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Features intuitive touch-screen control and solvent-resistant chambers. Supports multi-step recipes for precise photoresist coating and developing.

Specialized Coating
Systems

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Vibration-free Dip Coaters, Automatic Film Applicators, and Slot-Die systems for precise large-area coating.

Substrate Surface Preparation Systems

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Rapid surface activation. Effectively removes organic contaminants to improve adhesion before coating or bonding.

Thermal Processing
Systems

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High-uniformity heating platforms with PID control. Ensures stable temperatures

(up to 500°C) 

Physical Vapor Deposition
System

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Perfect for depositing conductive metal films for SEM sample preparation and electrode fabrication.

Lithography
Systems

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Cost-effective alignment and exposure tools. Delivers micron-level resolution for MEMS and microfluidic device patterning.

Let’s Talk Precision Processing

Want to learn more about our solutions? Talk to our experts, also you can direct sent a email to us sales02@setcas.hk

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