Redefining the Standard
in Precision Coating Technology
±1%
Film Thickness Uniformity

Smart Interface
Intuitive touchscreen with intelligent process control and data logging.
Wide Versatility
Handles diverse substrates
and aggressive chemistries with ease
Process Repeatability
Guaranteed batch-to-batch consistency for
all your thin-film processes.
Ultra-Low TIR
Precision Dynamically Balanced Chuck
UV-Ozone Surface Treatment
Synergistic Dual-Wavelength Cleaning
Our equipment utilizes a powerful combination of 185 nm and 254 nm UV wavelengths. The 185 nm UV converts atmospheric oxygen into potent ozone, while the 254 nm wavelength precisely breaks down molecular bonds in organic contaminants. This synergistic effect ensures thorough, atomic-level cleanliness without relying on harsh wet chemicals.
Non-Destructive Surface Modification
Beyond removing photoresist residues, our dry process significantly improves material wettability and subsequent coating adhesion. It causes absolutely zero damage to the substrate, making it ideal for delicate single-crystal materials, polymer activation, and preserving fine structures for high-resolution SEM/TEM analysis.
Precision Processing Systems Engineered for Reliability
For over 30 years, Setcas LLC has engineered process solutions designed to withstand the rigors of aggressive chemical environments. We don’t just assemble equipment; we build robust, chemically inert tools—from Spin Coaters and Mask Aligners to Magnetron Sputtering systems. Our mission is to provide the industrial-grade durability and repeatability you need, so you can focus on your science, not your hardware.
Our Core Competencies
High-Uniformity Spin Coating Systems

From compact manual units to programmable automated systems, we deliver consistent film thickness control for photoresists and polymers. Essential for repeatable R&D and pilot-line fabrication.
Surface Activation & Cleaning Solutions

Our Plasma and UV-Ozone cleaners effectively remove organic contaminants and modify surface wettability. Optimize adhesion and interface quality for bonding, coating, and microfluidics applications.
Lab Hot Plates & Thermal Solutions

Designed for precise soft-baking and curing. Our hot plates ensure exceptional temperature uniformity across the substrate, minimizing thermal shock and ensuring stable material properties.
High-Throughput Processing Tracks

Scale your process from lab to fab. Our automated coating and developing tracks integrate multiple steps to reduce operator error and increase production yield for standard semiconductor wafers.
UV Exposure & Alignment Systems

Cost-effective lithography solutions for MEMS and micro-devices. We provide reliable mask aligners and LED exposure units that deliver the resolution and accuracy required for academic and industrial research.
Custom Instrumentation & OEM Services

Beyond standard equipment, we engineer tailored solutions for unique experimental protocols. We collaborate with researchers to design and build specialized instruments that meet specific scientific requirements.



Spin Coating&
Developing System

Features intuitive touch-screen control and solvent-resistant chambers. Supports multi-step recipes for precise photoresist coating and developing.
Specialized Coating
Systems

Vibration-free Dip Coaters, Automatic Film Applicators, and Slot-Die systems for precise large-area coating.
Substrate Surface Preparation Systems

Rapid surface activation. Effectively removes organic contaminants to improve adhesion before coating or bonding.
Thermal Processing
Systems

High-uniformity heating platforms with PID control. Ensures stable temperatures
(up to 500°C)
Physical Vapor Deposition
System

Perfect for depositing conductive metal films for SEM sample preparation and electrode fabrication.
Lithography
Systems

Cost-effective alignment and exposure tools. Delivers micron-level resolution for MEMS and microfluidic device patterning.
Let’s Talk Precision Processing
Want to learn more about our solutions? Talk to our experts, also you can direct sent a email to us sales02@setcas.hk

























