KW-4X-II Integrated Coater/Developer/Bake (Dual Arm, EBR, Lift Pins)
$78,795.95
Substrate Compatibility: 5 – 200 mm (up to 8-inch wafers)
Spin Speed Range: 10 – 12,000 RPM
Acceleration: 10 – 10,000 RPM/s (Stepless adjustment)
Baking Module / Thermal Control: Ambient to 450°C, equipped with automated Lift Pins for precise substrate handling and proximity baking capabilities.
Advanced Dispensing & Automation
Dual Motorized Swing Arms: Equipped with two programmable dispense arms featuring 0 – 360° arbitrary positioning for ultimate fluid application precision.
Standard 4-Channel Dispense/Develop: Fully integrated 4-channel fluid delivery system. All lines feature precision anti-drip suck-back valves to completely eliminate nozzle dripping.
Edge Bead Removal (EBR): 2 dedicated channels utilizing the robotic arm system to execute automated, high-precision front and backside EBR processes.
Adjustable Vacuum Chucking: Fully adjustable vacuum holding force to safely accommodate various substrate types and fragilities.
Real-Time Vacuum Monitoring: Features an integrated live digital display of the vacuum chucking force, ensuring process reliability and substrate safety.
Resist-Ingress Prevention Module: Engineered with a built-in hardware protection mechanism to prevent photoresist and harsh chemicals from being drawn into the vacuum lines and motor housing.
Quantity
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Lead Time & Order Processing
Orders will be dispatched within 5 working days after payment confirmation, excluding weekends and public holidays. Once shipped, order cancellation or modification is not accepted.
Shipping & Delivery
All import duties, taxes, and customs-related fees are the buyer’s responsibility and will be charged according to the actual amount incurred at destination.
Customs & Import Duties
Returns or refunds for non-quality reasons are not supported. The product comes with a 1-year international warranty. A 2-year extended warranty is available for an additional fee.