SC-MA-I High-Precision LED Mask Aligner
$52,500.00
Ultimate Resolution: Down to 1 μm (Process and photoresist dependent).
Alignment Configuration: Supports Double-Sided Alignment (DSA) / Backside Alignment (BSA) combined with single-sided top exposure, ideal for MEMS and complex 3D microstructures.
Overlay Capability: Fully supports highly accurate secondary and sequential multi-layer overlay processes.
Light Source: Advanced high-power LED Illumination System, dedicated i-line (365 nm) for zero heat transfer and extended operational lifespan.
Maximum Exposure Area: 110 mm × 110 mm (Perfectly optimized for standard 4-inch / 100 mm wafers and square substrates).
UV Intensity: Up to 40 mW/cm² (Continuously adjustable for precise dose control and process optimization).
Beam Uniformity: ≤ ±3% over the entire exposure area, ensuring consistent pattern fidelity across the substrate.
Collimation Angle: ≤ 3° (Highly collimated beam for vertical photoresist sidewalls and superior resolution).
Quantity
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Lead Time & Order Processing
Orders will be dispatched within 5 working days after payment confirmation, excluding weekends and public holidays. Once shipped, order cancellation or modification is not accepted.
Shipping & Delivery
All import duties, taxes, and customs-related fees are the buyer’s responsibility and will be charged according to the actual amount incurred at destination.
Customs & Import Duties
Returns or refunds for non-quality reasons are not supported. The product comes with a 1-year international warranty. A 2-year extended warranty is available for an additional fee.