KW-4X Automated Spin Coater (with Programmable Arm & Front/Backside EBR)
$52,550.95
Substrate Compatibility: 5 – 200 mm (up to 8-inch wafers)
Spin Speed Range: 10 – 12,000 RPM
Acceleration: 10 – 10,000 RPM/s (Stepless adjustment)
Advanced Dispensing & Automation
Dispense/Develop Channels: Standard 4-channel configuration. All lines are fully equipped with precision anti-drip suck-back valves.
Motorized Swing Arm: Programmable dispense arm with 0 – 90° arbitrary positioning for highly precise fluid application.
Edge Bead Removal (EBR): Upgradeable with an optional robotic arm dedicated to advanced front and backside EBR processes.
Adjustable Vacuum Chucking: Fully adjustable vacuum holding force to safely handle fragile or varying substrates.
Real-Time Vacuum Monitoring: Features an integrated live display of the vacuum chucking force for precise process control.
Resist-Ingress Prevention Module: Engineered with a built-in protective mechanism to prevent photoresist and chemicals from being drawn into the vacuum lines and motor.
Quantity
Technical Data Sheet
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Orders will be dispatched within 5 working days after payment confirmation, excluding weekends and public holidays. Once shipped, order cancellation or modification is not accepted.
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Returns or refunds for non-quality reasons are not supported. The product comes with a 1-year international warranty. A 2-year extended warranty is available for an additional fee.