KW-4L-I Spin Coater
$17,995.95
Compatible Substrate Size: 5 - 200 mm (Standard) / up to 600 mm (Optional)
Rotational Speed: 10 - 12,000 RPM (Standard) / up to 20,000 RPM (Optional)
Acceleration: 10 - 30,000 RPM/s
Photoresist Ingress Protection with Alarm: Prevents coating solutions or photoresist from entering the vacuum line/internal mechanics and alerts the user.
Insufficient Vacuum Alarm and Interlock: Detects low vacuum pressure, triggering an alarm and engaging a safety interlock to prevent the machine from starting or continuing operation without a secure substrate hold.
Bidirectional Motor Rotation: Supports both forward and reverse (CW/CCW) spinning.
RS485 Communication Interface: Allows for remote control and data logging, and comes with complimentary remote communication software.
Keyboard and Mouse Compatibility: Supports standard external peripherals for easy recipe programming and interface navigation.
Power-off Protection for Recipes: Safeguards programmed recipes from being lost during unexpected power outages.
Integrated Auto-Dispensing: Enables automated, precise dispensing of photoresist or chemicals during the spin cycle.
Integrated Foot Pedal Support: Allows for hands-free operation to start/stop the spin cycle or dispensing.
Full PTFE Chamber: The entire inner spin chamber is constructed from Polytetrafluoroethylene (PTFE/Teflon) for superior chemical resistance and easy cleaning.
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Lead Time & Order Processing
Orders will be dispatched within 5 working days after payment confirmation, excluding weekends and public holidays. Once shipped, order cancellation or modification is not accepted.
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Customs & Import Duties
Returns or refunds for non-quality reasons are not supported. The product comes with a 1-year international warranty. A 2-year extended warranty is available for an additional fee.